Basic Information

Reference Number

0000265509

Issuing Organization

University of Ottawa

Owner Organization

University of Ottawa

Solicitation Type

RFQ - Request for Qualifications (Formal)

Solicitation Number

40151-17A-RFQ

Title

Plasma Etching System (New or Demo/Refurbished)

Source ID

PU.AC.ON.11752.C94742

Agreement Types

Broader Public Sector (BPS)

Canadian Free Trade Agreement (CFTA)

Details

Location

Canada, Ontario, Ottawa

Purchase Type

Duration: TBD

Description

1: Introduction and instructions to Proponents

1. - Background Information

Since 1848 the University of Ottawa has been Canada’s university and the largest bilingual university in Canada. At the University of Ottawa we understand our past and our desired future. The University of Ottawa is a major player in the cultural and economic development of the National Capital Region.

The University of Ottawa is one of Canada's leading research intensive University. The University of Ottawa fosters excellence and success in research, whether the research is basic or applied, of intrinsic value or of commercial importance. The University of Ottawa considers itself to be Canada's university of the 21st Century by launching new initiatives in emerging areas, promoting collaboration within and across faculties, and providing the milieu in which creativity can flourish.

Further information regarding the University of Ottawa can be found on the Web site http://www.uottawa.ca/

We hereby invite your company to partner with the University of Ottawa in this great project funded by the Canada Foundation for Innovation and the Ontario Research Fund by submitting an offer to this Request for Quotes and by including an in-kind contribution.

Please find attached the Request for Quotes documentation with specifications and the CFI guidelines pricing format to be completed and returned with your Quote.

1. - Statement of Requirements

1. 1. This Request for Quote (“RFQ”) is an invitation to prospective Proponents to submit Quotes for the provision of a Plasma Etching System (New or Demo/Refurbished)

1. 1. This project seeks to acquire, install and commission a plasma etching system within the uOttawa NanoFab. The NanoFab is a cleanroom user facility serving the University of Ottawa community as well as the broader academic landscape nationally and internationally. Its mission is to provide state of the art tools for fabrication and characterization of structures and devices at the nanoscale.

1. 1. General Description:

1. 1. 1. The instrument sought is a plasma etching system capable of reactive ion etching (RIE) and inductively coupled plasma (ICP) etching. The instrument must accommodate wafers of diameter up to 200 mm as well as wafer pieces and must be supplied with all the required supporting equipment (pumps, external and internal gas pods for process and purge gases, all cables and hoses, as well as power supply transformer, manuals and installation documents). The instrument must include a computer running a recent operating system (at least Windows 10) as well as user-friendly software required to operate the instrument, including tool diagnostics, monitoring, and process recipes. The system may be New, or a Demo/Refurbished but not older than 10 yrs. The system must be supplied with a one-year warranty on a new and at least a 4-month warrantee on a demo/refurbished system, which initiates after the tool is installed, commissioned and operational.

The system will be housed in the Advanced Research Complex (ARC), 25 Templeton St., Ottawa ON, Canada, in room 333B. The room is part of the uOttawa NanoFab, a cleanroom facility which is open-access and serves multiple users.

The University is limited in funds for the Plasma Etching system, and therefor seeking to acquire the best valued system that meets all of the Mandatory requirements, either as a new or Demo/refurbished system.

1. 1. Should any instrument included in a Quote be superseded by a newer model during the period of time between the award of contract and the delivery date, the successful Proponent will be required to inform the University of Ottawa of the new specifications, the newer model pricing will remain the same as what was offered in the RFQ. At its sole discretion, the University of Ottawa may opt to make changes from the list of instruments by altering, adding, or deducting some instruments.

Dates

Publication

2024/02/29 12:52:50 PM EST

Bid Intent

Not Available

Question Acceptance Deadline

2024/03/07 12:00:00 AM EST

Questions are submitted online

Yes

Closing Date

2024/03/14 03:00:00 PM EDT

Contact Information

Ana Lopes

613-562-5800 ext. 2312

alopes@uottawa.ca

Buyer Preferences, Guidelines & Requirements

General Requirements

- Installation Required

- Insurance Required

- Training Required

- Warranty Information Required

Bid Submission Process

Bid Submission Type

Electronic Bid Submission

Pricing

In attached document

Bid Documents List

Item Name	Description	Mandatory	Limited to 1 file
Attachment # 1	Technical/Qualitative Proposal	Yes	No
Attachment # 2	Financial Proposal	Yes	No
No entries

Additional Bidding Instructions

1. - Quotes Submitted Only In Prescribed Manner

1. 1. The Proponent’s Quote must be submitted in the following manner:

1. 1. The Proponents must submit their Quote using Merx EBS no later than the time and date stated in section 2.2 – timetable. No other forms of delivery will be accepted by the University.

The Quotes must be complete and submitted in the prescribed format with the following information:

1. 1. The Proponent must provide two (2) separate attachments (files) containing the Proponent’s Quote labelled in the following manner:

Attachment #1 Technical Documents: 40151-17A-RFQ_Insert Company Name
Attachment #2 Financial Quote: 40151-17A-RFQ_Insert Company Name

1. 1. Attachment #1 – Technical Documents must include the following mandatory documents:

Appendix A ( Technical Specifications Compliance form)
Appendix B (Equipment, Utility, and Environmental requirements form) and all the referenced associated documents.
Appendix C (Supplemental Information)
Appendix D (Reference form)
Appendix E (Submission declaration form)
Appendix H (Proponent’s Checklist form)
All supporting technical documentation
Bottom of Every Page is initialled in this RFQ

1. 1. Attachment #2 – Financial Quote must include the following mandatory documents:

Appendix F (Pricing structure form) completed and signed in accordance with the Mandatory requirements of this RFQ along with the Financial Quote;
Appendix G, (detailed Price Schedule, with all costs form)

© MERX - All rights reserved. No part of the information on this Web Site may be reproduced, stored in a retrieval system or transmitted in any form or by any means, electronic, mechanical, photocopying, recording or otherwise without the prior permission of MERX and the Minister of the participating government department (if applicable). MERX, the Minister nor the Contracting Authority will assume responsibility or liability for the accuracy of the information contained in the publication.