Notice of Intended Procurement
NAME OF PROCURING ENTITY
The Governing Council of the University of Toronto (the “University”)
CONTACT PERSON AND CONTRACT PERSON COORDINATES
Renee Cheng
215 Huron Street, 3rd Floor
Toronto, ON M5S 1A2
reneeke.cheng@utoronto.ca
PROCUREMENT DOCUMENTS
The procurement documents are available at www.merx.com.
Note that obtaining access to the procurement documents will require prospective suppliers to register and pay a registration fee. Pricing and Payment Terms are available on the MERX website.
DESCRIPTION OF PROCUREMENT
The University is conducting an RFP for Compact Atmospheric Wet/Dry Oxidation Furnace System
The Toronto Nanofabrication Center (TNFC) is the University’s central micro- and nanofabrication facility, serving academic research and development needs, as well as training functions. Advanced tools for MEMS and nanophotonics will enable the TNFC to conduct active interdisciplinary research.
The Center wishes to purchase an oxidation furnace from a supplier that demonstrates its ability to the supply, implement and provide continued customer service related to the system through this RFP process. The oxidation furnace should be reliable and easy in operation, which is important to a typical multi-user facility. It should offer exceptional performance in growing uniform SiO2 on a batch of Si wafers (up to 6-inch). The principal aim in purchasing this system is to provide straightforward access with cost-effective service to a wide base of Canadian researchers. The instrumentation will be located at the University of Toronto and operated only by trained users.
The procurement is anticipated to involve negotiation. An electronic auction is not anticipated.
ADDRESS AND FINAL DATE FOR SUBMISSIONS
Submissions must be submitted electronically at https://utoronto.bonfirehub.ca/ on or before Tuesday, July 16, 2024 (2:00 PM local time). The submissions will not be opened publicly.
CONDITIONS FOR PARTICIPATION
Proponents should achieve a score of 65% out of the available 75 technical points (from B.1 to B5) of total 100 points.
APPLICABLE TRADE AGREEMENTS
This procurement is subject to the following trade agreement(s):
- The Canadian Free Trade Agreement, Chapter Five
- The Comprehensive Economic and Trade Agreement, Chapter 19
- The Ontario-Quebec Trade and Cooperation Agreement, Chapter 9
CONTRACT DETAILS
The term of Agreement is intended to be for a period of one year with optional one year extension.
EVALUATION CRITERIA
The University will base its selection of qualified suppliers on the following criteria:
Schedule D Part 1
Technical Submission Requirements Weight
B.1 Experience and Qualifications 5
B.2 Technical Requirements
B.2.1 Demonstration of process capability 28
1) System overall design 8
2) Wafer size 6
3) Wet oxidation 7
4) Dry oxidation 4
5) Anneal 3
B.2.2 Software 15
B.2.3 Regulatory and Industry Standards
Compliance 2
B.3 Delivery, Installation and Testing 9
B.4 Training Services 7
B.5 Warranty and Extended Warranty 9
Schedule D Part 2
Financial Submission 25
Total 100
Optional Demonstration 15
Total incl. Optional Presentation 115
NOTES
Suppliers should note that information contained within this notice is subject to change. Suppliers are encouraged to obtain the procurement documents which contain the most current information. If there is a conflict between the procurement documents and this notice, the procurement documents will take precedence.
