Notice of Intended Procurement
NAME OF PROCURING ENTITY
The Governing Council of the University of Toronto (the “University”)
CONTACT PERSON AND CONTRACT PERSON COORDINATES
Renee Cheng
215 Huron Street, 3rd Floor
Toronto, ON M5S 1A2
reneeke.cheng@utoronto.ca
PROCUREMENT DOCUMENTS
The procurement documents are available at www.merx.com.
Note that obtaining access to the procurement documents will require prospective suppliers to register and pay a registration fee. Pricing and Payment Terms are available on the MERX website.
DESCRIPTION OF PROCUREMENT
The University is conducting an RFP for an electron beam evaporator specialized for fabrication of superconducting quantum devices. The evaporator should provide capabilities of depositing superconducting films in a near ultra-high-vacuum environment at controllable deposition angles, and also provide capabilities of in situ ion-beam cleaning and oxidation at controlled gas pressure and flow rates. The key purpose of this system is to fabricate high-quality superconducting devices based on Al/AlOx/Al Josephson junctions on up to 4-inch wafers, and therefore it is important that the instrument provides an automated and proven reliable process for Josephson junction deposition. The procurement is anticipated to involve negotiation. An electronic auction is not anticipated.
ADDRESS AND FINAL DATE FOR SUBMISSIONS
Submissions must be submitted electronically at https://utoronto.bonfirehub.ca/ on or before Tuesday, January 28, 2025 (2:00 PM local time). The submissions will not be opened publicly.
CONDITIONS FOR PARTICIPATION
The procurement is subject to the following conditions for participation: see Data Sheet, 6.2.2
APPLICABLE TRADE AGREEMENTS
This procurement is subject to the following trade agreement(s):
- The Canadian Free Trade Agreement, Chapter Five
- The Comprehensive Economic and Trade Agreement, Chapter 19
- The Ontario-Quebec Trade and Cooperation Agreement, Chapter 9
CONTRACT DETAILS
See Form of Agreement, 2.1 Term
EVALUATION CRITERIA
The University will base its selection of qualified suppliers on the following criteria: Data Sheet, 6.2
Schedule D Part 1 Technical Submission Requirements Weight
B.1 Experience and Qualifications 10
B.2 Technical Requirements
B.2.1 Demonstration of process capability
a) System overall design 8
b) Sample loading and stage control 5
c) E-beam evaporation 5
d) Ion-beam etching 5
e) Oxidation 4
f) System vacuum level 5
g) Other functions 3
B.2.2 Software 10
B.2.3 Regulatory and Industry Standards Compliance 2
B.3 Delivery, Installation and Testing 6
B.4 Training Services 4
B.5 Warranty and Extended Warranty 8
Schedule D Part 2 Financial Submission 25
Total 100
Optional Demonstration 10
Total including Optional Demonstration 110
NOTES
Suppliers should note that information contained within this notice is subject to change. Suppliers are encouraged to obtain the procurement documents which contain the most current information. If there is a conflict between the procurement documents and this notice, the procurement documents will take precedence.